In the fast-evolving world of the semiconductor industry, precision and reliability are paramount. The demand for cutting-edge tools to ensure quality control and drive technological progress is ever-growing. Nanosurf, a leader in Atomic Force Microscope (AFM) technology, delivers cleanroom-compliant AFM systems that redefine measurement precision for semiconductor manufacturing solutions. These advanced systems are designed to meet the unique challenges of the industry, offering innovative solutions that enhance efficiency, accuracy, and automation.
Traditional AFM systems are optimized for small samples, typically a few millimeters or centimeters in diameter. However, Nanosurf’s AFM solutions push boundaries by accommodating large, non-planar samples—up to several hundred millimeters in diameter—while maintaining complete sample coverage. This capability introduces significant engineering challenges, as larger samples require a larger mechanical loop, the path connecting the cantilever tip to the measurement site. A larger loop can compromise system stability and increase noise levels, making it difficult to achieve the picometer-scale precision required.
To address this, Nanosurf employs the finite element method (FEM) to simulate system performance and account for mechanical disturbances. Close collaboration with suppliers ensures accurate modeling of components during the mechanical design process. This rigorous approach allows Nanosurf to achieve the low noise levels critical for high-precision measurements. The interplay between mechanical and control design is carefully managed, with multiple rounds of system evaluations and safety adjustments to meet stringent performance and safety requirements.
Nanosurf’s AFM systems are designed for full automation, streamlining the entire sample analysis process. From loading specimens to executing specific measurement routines, these systems integrate with factory control systems through advanced data links. A standout feature is the cantilever auto-exchange mechanism, which, combined with sub-micron repositioning accuracy, ensures consistent and reliable operation. The real-time programmable logic control (PLC) system is central to this automation, ensuring machine safety, precise motion control, and seamless management of the AFM acquisition software.
The PLC interface is user-friendly, enabling operators without deep AFM expertise to run pre-defined operational sequences, or “recipes.” Operators can interact directly with the system using a mobile panel for real-time observation of processes, while remote access functionality allows service teams to troubleshoot and maintain systems efficiently. This automation is developed in close partnership with customers, aligning with their specific quality control processes to deliver tailored semiconductor manufacturing solutions.
Cleanliness and Compliance are non-negotiable in the semiconductor industry. Nanosurf’s cleanroom-compliant equipment is designed and produced in controlled environments to meet the industry’s rigorous standards. From design to system commissioning, every step of the process chain prioritizes cleanliness to prevent contamination and ensure consistent performance. This commitment to quality makes Nanosurf a trusted partner in delivering reliable measurement solutions.
The system commissioning phase is a critical step in deploying Nanosurf’s AFM systems. During the COVID era, Nanosurf adapted to unique challenges by leveraging cleanroom-compliant equipment and remote access capabilities. Cleanroom clothing protected on-site teams, while remote tools minimized unnecessary travel, ensuring the safety of Nanosurf employees and partners. Successful project completion required the coordination of over 50 individuals, including Nanosurf’s team, customers, suppliers, and external partners. Careful planning, clear communication, and precise project management were essential to delivering these complex systems on time and within specifications.
Nanosurf is revolutionizing the semiconductor industry with its cleanroom-compliant AFM systems, addressing complex engineering challenges and delivering unparalleled precision and automation. By integrating advanced features like cantilever auto-exchange, remote access, and robust PLC interfaces, Nanosurf empowers manufacturers to achieve superior quality control. The company’s commitment to Cleanliness and Compliance, combined with seamless system commissioning and collaboration with Nanosurf employees and partners, ensures that its AFM solutions are at the forefront of innovation. As the semiconductor industry continues to evolve, Nanosurf remains a trusted partner, driving progress with cutting-edge semiconductor manufacturing solutions.
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References: Nanosurf