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LiteScope™
LiteScope AFM-in-SEM
Unique Atomic Force Microscope LiteScope is designed to merge the strengths of AFM and SEM techniques, resulting in effective workflow and extending the possibilities of correlative microscopy and in-situ analysis that ware difficult or almost impossible by conventional instrumentation.
Simultaneous AFM and SEM measurement allows nanometer precise data correlation, making LiteScope a powerful tool for a variety of fields such as Material science, Nanotechnology, Semiconductors, Life science and other areas of research and industry.
| Dimensions XYZ | 118 mm x 84 mm x 35.7-48.4 mm | Scan range in open loop XYZ (±10%) | 100 μm x 100 μm x 20 μm |
| Total weight | 460 g | Scan range in closed loop XYZ | 80 μm x 80 μm x 16 μm |
| Vacuum working range | 105 Pa to 10-5 Pa | Resolution XYZ up to | 0.2 nm x 0.2 nm x 0.04 nm |
| Operating temperature | +10 °C to +35 °C | Maximum sample height | 8 mm |
| Maximal scanned sample area XYZ | 21 mm x 11 mm x 8 mm | Maximum sample weight | 100 g |